Small-sized high-vacuum low cost exhaust equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in pipe frames.
Ideal for experiments, such as basic research and development of small boards.
Features
Easy viewable through glass belljar and easy maintenance.
The vacuum chamber can be opened without stopping the main pump.
Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible.
It is easily moving vacuum pumping system with casters.
Specification
| Model | VPC-260F |
| Specification | Ultimate pressure | 1.3×10-３Pa
6.6×10-４Pa（with LN cold trap） |
| Evacuation time | 4.0×10-３Pa/20min
1.3×10-３Pa/20min（with LN cold trap） |
| Vacuum chamber | Vacuum chamber | Glass bell jar (dia.300mm × 300mm(H)) |
| Feedthrough collar | 8 ports (side 8) |
| Recommended substrate size (Maximum substrate size) ※1 | □50mm ・ □140mm（Max） |
| Power supply system | Evaporation electrode structure | 1 point |
| Evaporation Electrode / power supply | SEREM “PSE-150C” 1 set
0～10V 150A（Max) |
| Exhaust system | Main pump | Oil diffusion pump（Air cooling） 200L/sec |
| Liquid Nitrogen trap | Option |
| Sub pump | Oil rotary pump100L/min |
| Oil mist trap | Option |
| Operation system | Main valve | Clapper valve |
| Sub valve | Three way valve |
| Automatic leak valve | Option |
| Control | Manual control |
| Control system | Pirani vacuum gauge | Option |
| Ionization vacuum gauge | Option |
| Setup | Extreial dimensions Body | 530mm（W）×550mm（D）×1135mm（H） |
| Power supply | 480mm（W）×435.3mm（D）×149mm（H） |
| Weight Body | 75kｇ |
| Power supply | 40kg |
※1：The values of the maximum board size are shown when film thickness distributions are not taken into account.
Utility
| Model | VPC-250F |
| Power required | Body | 100V Single phase 50/60Hz 1.35kVA |
| Power supply | 200V Single phase 50/60Hz 1.5kVA |
| Ground terminal | D grade (ground resistance/100Ω or less) |
| Connection | Body 1Φ 100V | Cabtyre cable (with plug) 2m |
| Power supply 1Φ 200V | Cabtyre cable (with R2.0-5 ring tongue terminals) 2m |
Dimension drawing
VPC-260F
Evaporation Electrode SEREM
Feedthrough Collar
Basic composition
Optional parts
