| Model | VTR-060M/ERH |
| Specification | Ultimate pressure | 10-４（No load cleaning in the vacuum layer）
1.5×10-３Pa（OptionSpecification） |
| Evacuation time | 4.0×10-３Pa/20min（No load cleaning in the vacuum chumber） |
| Vacuum chamber | Vacuum chamber | Cylindrical Glass belljar （Φ236mm×Ｈ250mm) |
| Base plate | 7 ports (side ) |
| Recommended substrate size (Maximum substrate size) | □50mm (□140mm) |
| Power supply system | Evaporation electrode structure | 1 point |
| Evaporation Electrode /power supply | SEREM “PSE-150C” 1 set
0～10V 80A (MAX) |
| Exhaust system | Main pump | Turbo molecular pump(Air cooling) 60Ｌ/sec |
| Sub pump | Oil rotary pump20L/min |
| Oil mist trap | OMT-050A |
| Operation system | Main valve | Option（Butterfly valve） |
| Sub valve | Option（Three way valve） |
| Automatic leak valve | Option（solenoid valve） |
| Vent valve | Option（Leak port） |
| Control | Manual control |
| Control system | Gauge | Option (ISG1) |
| Deposition Controller | Option (CRTM-6000G) |
| Setup | Extreial dimensions Body | 428mm(W)×438mm(D)×713mm(H) |
| Power supply | 480mm(W)×435.3mm(D)×149mm(H) |
| Weight Body | 50Kg |
| Power supply | 24Kg |